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Förslaget inkom 2006-12-13

Experimental testing of an ion fraction meter

OBS! ANSÖKNINGSTIDEN FÖR DETTA EXJOBB HAR LÖPT UT.
A research area in the front line of new materials development is the production of nanoscale structured surfaces with very special properties. We are part of an international project for the development of magnetrons (a type of plasma device that is already playing a key role in the microelectronics industry) into a new parameter regime for this purpose. The project homepage is found at www.innovatial.com.

One of the advantages with the new technique is that a large fraction of the neutrals that are sputtered from the target can become ionized on their way to the substrate where they are deposited. Deposition of ionized components makes possible new and potentially very important applications.

A problem is that there today exists no good method to measure the relative fraction of ionization during the deposition. The thesis work offered here is to test a new type of ion fraction meter that we are now building, and which we hope will solve this problem. The tests shall be made in a plasma device that is located at Linköping University. The work can either be made by a student based in Linköping who makes a few trips to KTH for instructions, or by a student based in Stockholm who then has to travel to Linköping for measurement campaigns in the testing process.



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